Business Items 營業項目

02-01.:INSULATOR KAPTON SHEET..TEL#1A80-004208-12/1A80-004419-13/1A10-201474-11
02-09.:NOZZLE LIP TAPE/Silicone Adhesive tape-CHANGJO(CHAN JO)#HCT-940、HCT-940A..
03-17.:QUARTZ CAP OF SCREW..
03-18.:QUARTZ VIEW PORT WINDOW..TEL#1A10-402430(418117)-11/EP4-0
03-19.:QUARTZ WINDOW PLATE..TEL#1A10-101936-11
03-21.:QUARTZ BAR/BLOCK..
04-01.:PLUG OF CLAMP..TEL#1A10-407411-11
04-02.:CERAMIC REGULATOR WALL..TEL#1A10-310828-11、1A10-310829-11
04-04.:LOWER SHIELD RING(1)/(2)..TEL#1A10-311412/3-11
04-05.:UPPER SHIELD RING..TEL#1A10-200807(8)-12(1)
04-06.:SHIELD RING BOTTOM..TEL#1A10-302709-11
04-07.:UPPER SHIELD PLATE..TEL#1A10-100328-11
04-08.:SHIELD RING LOWER..TEL#1A10-312819(20)-12(3)
04-09.:CERAMIC CAP VAC M18..TEL#1A10-419286-13
04-10.:CERAMIC COVER PLATE..TEL#1A10-..
04-11.:CERAMIC REMOVE BLOCK/SHEATHING..1A10-422182-12
04-12.:CLAMP RING SET..TEL#1A10-..
04-13.:CERAMIC ADAPTER PLATE..TEL#1A10-209408~11-13
04-14.:CERAMIC SPACER BAR..TEL#1A10-327241-11、1A10-327242-11
04-15.:CERAMIC PROTECT PLATE..1A10-209416~19-11
04-16.:CERAMIC CLAMP SUPPORTER..1A10-409754-11、1A10-430934-12
04-17.:CERAMIC VACUUM SCREW/Ceramic Screw 陶瓷(真空)螺絲..
04-22.:CERAMIC CAP VAC M12..1A10-419302-13
04-23.:CERAMIC INSULATION SPACER 陶瓷絕緣墊片..UP-Z1-A001023/526
04-24.:INSULATION PEDESTAL 陶瓷絕緣墊塊..UP-Z1A-0942112
04-25.:CERAMIC BLOCK/Ceramic Gas Plate 陶瓷塞片/陶瓷氣板..
04-26.:CERAMIC LIFTER/LIFT PIN 陶瓷頂針..TEL G6
04-28.:Ceramic COVER PLATE with GAS HOLES-1..
04-29.:Ceramic COVER PLATE with GAS HOLES-2..
06-07.:INSULATOR TEFLON SHEET/TEFLON tape 鐵氟龍膜片/膠帶..
06-09.:TEFLON BLANK..
08-01.:LOWER BUFFER PLATE SCREW..1A10-402712-11
08-02.:SCREW BETWEEN CLAMP..1A10-410644-11
08-03.:L/L BUFFER PAD/SCREW..
08-04.:BALL TRANSFER 萬向球..
08-05.:M12 SUS VACUUM SCREW 真空螺絲..
08-06.:M18 SUS VACUUM SCREW 真空螺絲..
10-01.:SENSOR COVER..1A10-410576-11
10-02.:EPD WINDOW COVER..1A10-309162-11
10-03.:INSIDE PLATE..1A10-xxxxxx-11/2
10-04.:GATE DOOR COVER/LINER..1A10-309689-11
10-05.:UPPER ELECTRODE,AL..1A10-201474-11
10-06.:SCREW PROTECTION CAP, AL+Anodize..
11-01.:BUFFER PLATE BOTTOM..1A10-312766/7-11
14-02.:GEAR RACK-SS1800..1A02-400720-12
17-03.:LIFT PIN 頂針 for TEL G2.5~G3.5..1A10-333393-11/1A10-327376-12
17-08.:SECOND/2nd PAD(PIN TWO PAD)..1A10-420910-11
17-09.:WASHER,Vespel®..
17-17.:LIFT SUPPORT PIN,DuPont™ Vespel® SP-1..1A10-327278-12
17-20.:Vespel SCREW..
17-21.:Vespel PROTECTION CAP with 4 GAS HOLES..

05-01.:SUPPORT TUBE SET(PVC頭)..
05-02.:SIDE GUIDE ROLLER for AL/Stripper..7J438712(7-J4-38712)
05-03.:WASHER IN MOTOR 軸套..7J407137
05-04.:AXIS RECEIVER SIN MOTOR 軸套..7J407136
05-05.:ROLLER HOLDER SET FOR DRY UNIT..7J415411/2
05-06.:ROLLER HOLDER 滾輪軸座..
05-07.:BEARING HOLDER..7J33724708
05-08.:EXIT GUIDE ROLLER 滾輪..
05-09.:ROLLER BUSH 軸套..7J428578
05-12.:BEARING-D25..7J409232
05-13.:W/E ROLLER BEARING..
05-21.:PPS/PVC聯軸器+UPE/PVDF內環..07070167-203501~2
05-22.:TRANSFER ROLLER FOR STRIPPER LINE..
05-23.:下BELT ROLLER FOR WATER LINE..
05-24.:ETCH C/H OSCG軸-SPACER、大/小SNAP RING...
05-26.:FREE ROLLER RING+迫緊件+鎖合件..
05-27.:FLICKER SENSOR PEDESTAL,PVC..
05-28.:FREE ROLLER..
05-30.:SNAP RING 傳送帶C型扣環+滾輪扣環..
05-31.:SIDE GUIDE ROLLER BEARING..7J434835
05-32.:GUIDE ROLLER 導輪..
05-33.:SUPPORTER ALIGN SHAFT(Wet-Etching段Spray槽)..
05-34.:SUPPORTER TUBE+SEAT(Wet-Etching段Deep槽)..
05-35.:SUPPORTER TUBE+SIDE GUIDE ROLLER(懸吊式)..
05-36.:SUPPORTER TUBE+SEAT+SIDE GUIDE ROLLER(導角式)..DNS-Screen#72981242+72981241+72981243
05-37.:雙C型對鎖環止檔HOLDER/STRIPPER ROLLER USE FIXTURE.去光阻槽固定器
05-38.:STOP PIN 止擋板..
05-39.:EXIT GUIDE ROLLER/GUIDE ROLLER 斜角..
05-40.:3ble雙C型扣環HOLDER/ETCH ROLLER HOLDER.蝕刻槽滾輪HOLDER.PVC..
05-41.:可調式HOLDER..
05-42.:軸承HOLDER for UP Conveyer use..
05-44.:KCT FLICKER SENSOR 座..KCT#
06-01.:上ROLLER(蝶翼)..7J425123
06-02.:MAINTENANCE側下ROLLER(蝶翼)..7J425124
06-03.:下ROLLER(中間)..7J425181
06-04.:STRIPPER OP側下ROLLER..7J425122
06-05.:UP/DN SIDE ROLLER..
06-06.:TEFLON ROLLER FOR FLICKER SENSOR SEAT..
06-08.:STRIPPER SIDE ROLLER..7J434834
06-10.:上/下SIDE ROLLER FOR STRIPPER段-..7J460830/7J460829
06-11.:FREE ROLLER for STRIPPER..、7J434835
06-13.:GUIDE ROLLER 導輪..7J425189
06-14.:DN ROLLER for STRIPPER SECTION..7J429518
06-15.:UP ROLLER for STRIPPER SECTION..7J429522
06-16.:溝槽式 UP ROLLER..7J429519
06-17.:FREE ROLLER(下) FOR STRIPPER段-..7J44397004,KMFA-266034
06-18.:STRIPPER UP/DN SIDE/MIDDLE GUIDE/FREE ROLLER..SEMES#KMFA-265989~8/KMFA-289914+289875
07-01.:SEAL O RING..RVZJ001775Z80D.7-3
07-04.:GASKET/PACKING-ASAHI AV series(PTFE+EPDM)..0-39-06616~8
11-02.:STRIPPER CHAMBER ORING,SUS O型環..
11-03.:FREE ROLLER 固定器,SUS/Free Roller 配件組..
11-04.:FLICKER SENSOR PEDESTAL,SUS..
11-05.:FLICKER SENSOR SEAT,SUS..
12-01.:FLICKER SENSOR..FK5-SUS-PFA2-xxxx
13-01.:BALL BEARING UPG#6005/#6905~4..73990054
13-02.:SUPPORT ROLLER BEARING..SJ-295A
13-03.:SIDE GUIDE BEARING ROLLER..DMS#PK/UPE 630 KZB1
13-06.:SCREW BEARING FREE ROLLER/FREE ROLLER BEARING.軸承
13-07.:EXIT BEARING GUIDE ROLLER/GUIDE ROLLER BEARING.出口導輪培林
14-01.:MOTOR GEAR 馬達齒輪/減速機..7J424145/ 7J407174
14-03.:GEAR HEAD 扇型齒輪頭..7J326627/6882/8608/87831
14-04.:OBLIQUE GEAR 斜型齒輪頭..
14-05.:MOTOR AXIS/PULLEY 馬達軸芯/皮帶輪組..
14-07.:SUS C型扣環 of S20/S25..
14-08.:AL PULLEY..7J45224702(R)
14-09.:SFT SPUR GEAR(POM)..DMS#HC1100-040W0007-0
14-10.:SPUR GEAR(PP/PTFE)..DMS#WS0000-040W00**-0
14-11.:WORM WHEEL(POM)(6_1)..DMS#WS0000-040W0027-3
14-12.:WORM WHEEL(PP)(6_1)..DMS#WS1950-042W5001-0
14-23.:EUV Motor Gear..DMS#/KCT#
14-24.:C/V motor(出口)..DMS#/KCT#
14-25.:C/V 傳動軸Gear..DMS#/KCT#
14-26.:EUV 傳送Gear..DMS#/KCT#
14-27.:Roller Gear..DMS#/KCT#
14-28.:Dry A/K Motor Gear..DMS#/KCT#
14-29.:EUV Roller Gear..DMS#/KCT#
14-30.:Double Roller Gear..DMS#/KCT#
16-01.:磁性ROLLER..7T2338111
16-02.:整截式 磁性ROLLER UNR095/060..7-39-89512、7-39-89511
16-03.:半截式 磁性ROLLER..7-39-89514
17-12.:HEATER FUSE LINE..SEFUSE-SF119E

02-07.:SHEET SUPPORT-125/WASHER KAPTON A..1D10-407211-11/1D10-405257-11
03-01.:SUPPORT SHIELD DEPO Q-S5..1D05-200033-11
03-02.:COVER BAFFLE Q-L3..1D05-200031-11
03-04.:WINDOW DEPO SAF0.5..1D10-406499-11
03-13.:PIN INSULATOR LA6.0(DRM2 QUARTZ)..1D05-300133-11
03-14.:SHIELD DEPO QU-A-3(DRM2 QUARTZ)..1D05-200020-11
03-15.:RING INSULATOR B2(DRM2 QUARTZ)..1D05-300053-14
03-35.:PLATE UPPER Q FLAT..1D05-300067-13
03-36.:RING F-8SO-Q-260-6H(DRM2 FOCUS RING)..1D05-300162-11
04-03.:SLEEVE B3(DRM2)..1D10-404153-11
04-20.:CERAMIC TUBE..15-034333-11 REV B4801 US2000
04-30.:CERAMIC Robot Pad..
05-10.:PLUG THIN..1D10-401106-12
05-11.:S/D PFA SUPPORTS 6P/SET POLYMAX..PL0005/000M3813-505
05-14.:PFA COVERED SPRING..SP0001
05-15.:PIN ADJUST..1D10-404285-11
05-16.:S/D PIN SUPPORT POLYMAX..PL0014
05-17.:ECCENTRIC PIN 2.0MM RINGGROVE..2006830-00/01
05-18.:PIN SNAP ROTOR..000M4663-01 & 000M4663-03
05-19.:PIN CROSS RETAINER..000M4667-505
05-25.:RETAINER BAR 20MM 52 WAFER..550R0006-503 & 505/550R0006-501
05-29.:ECCENTRIC PIN CHUNK300..2008086-xx
11-06.:UPPER COOLING PLATE..1810-221584-12
17-04.:Vespel SCREW/PLUG..TEL88DD#1D10-406875-11/1D10-406876-11/1D10-406675-11/1D10-405256-12(22)
17-05.:PLUG BIAS SILICON CARBIDE ESC..0020-09865
17-06.:SCRAPER DEPO..1D10-407236-11
17-13.:SILICON UPPER ULECTRODE..1810-22147-24
17-14.:SILICON INSERT RING..0200-100446
17-15.:SILICON FOCUS RING..1D10-302209-14/1810-225123-11/1810-324902-11/1D05-300296-11...
17-16.:12'' ESC Hot Plate Heater/ULVAC Hot plate, 12''..KTMS-300D-A-1
17-22.:CELL BODY ASSY,SCCM-OX(SE)/set..TEL#3D87-003411-14B(3D10-302020-11+3D10-403381-11+3D10-403380-11+3D10-450070-13)

18-01.:PURGEMETER、FLOW MONITOR、VORTEX FLOW SENSOR/METER-TOKYO KEISO#ALL series
18-03.:METALEX FLOW SENSOR,RYUTAI KOGYO-KUBOTA/AKEBONO#MK515/525-*、+GF+-Signet#P515/525-*、RDM-100/200/300 series
18-04.:VORTEX FLOW SENSOR/METER-SAGInoMIYA_KARUMAN ACE#JLK、ULK series..
18-11.:AC SERVO DRIVER-Panasonic#DV40P***、MADDT1207、MFECA0100EAE-T+MFMCA0100EED-T...
18-13.:SOLENOID VALVE 電磁閥-SHINWA Controls#N222/N322/SV/SVC series
18-14.:YASKAWA-AC Servo Motor#SGMDH/SGMPH/SGMGH/SGMAS series、Minertia DC Motor(R series)/ P/C Motor(2 Cable)#R02MA series
18-15.:AC SERVO MOTOR-Panasonic#MFA*/MHMD* series
18-16.:ULTRASONIC FLOW METER/DEPTH SOUNDER(超音波流量計)..HONDA ELECTRONICS#HLF600、HLF800 series..
18-19.:MITSUBISHI ELECTRIC-LINEAR MOTOR#LM-UP3C-200M-01、AC SERVO MOTOR#HC/HF series..
18-20.:Stepping Motor Driver-RORZE#RD-326M50A..
18-21.:THERMAL FRESH 溫溼度控制器-ORION#AP-750FS-DW/GW、Temperature Controller 溫度控制器-RKC INSTRUMENT#REX-C2000 ..
18-22.:POWER SUPPLY-USHIO_FUJI ELECTRIC#PUM-5000H/LE-LT-5.0、TDK-Lambda(DENSEI LAMBDA)#DLP series..
18-24.:RF Generator-SHINDENGEN#XR-P1350、XR-M13100 SM..
18-25.:Vacuum Gauges sensor(Ionization Gauge)-ULVAC#WI-T18、WP-01/02/03..
18-26.:THK MICRODEX α15B-Yokogawa Electric_DYNASERV#SD 1050A02/SR 1100A02、Driver#LSDH* series..
18-27.:YAMATAKE_azbil Leak Sensor(Liquid Leak Detector Fiber Units)#HPF-D040、Fiber Amplifier(AMP.)#HPX-H1..
18-28.:Power Electronics/Optoelectronics-KYOTO DENKIKI(KDN/KyotoDenkiki)#ALL series
18-30.:Fluid Control/Solenoid Valve(流體控制閥)、Electronic Pressure Switch(電子壓力開關)-CKD#all series
18-32.:AC SERVO MOTOR/Photointerrupter(光遮斷器/反射型光電素子)-OMRON#SX/SPY/E* series
18-33.:Level Sensor/Photoelectric Switch Fiber Unit(光纖感應器)-OMRON#E32-T16J-1、E32-A08H2-2/3/5M..
18-34.:SMC-Pilot Sensor#PS1000-R06L、Directional Control Valves#SZ3160-5MZ-C4-X40..
18-35.:Indicator(Precision Aneroid Manometers) 精密圧力計-NKS(NAGANO KEIKI 長野計器)#GS-2004-01、GC96-111..
18-37.:ORIM VEXTA®-Motor#BL460GD-AMK + Driver#BLD60A-MK + Reducer/Gearbox#4GD100K=BX460AM-100S..
18-39.:DIGITAL DISPLAY-YUTAKA#YS700(YS-700)、Crown®#ALL series..
18-41.:BS SERVO Motor-TOEI_VELCONIC®#VLBSV/VLBSG/VLBST-* series..
18-42.:DIGITAL CONTROLLER-TOHO Electronics#TTM-* series デジタル調節計..
18-43.:Positioning Controller 位置決めコントローラ..NSD#VS-* series
18-46.:MASS FLOW CONTROLLERS(MFC)/METERS-LINTEC#LM/LC/AM、MC/MM、HX series..
18-50.:Air Cylinder 氣缸-SMC®#MB/MDBT series、Low Profile Air Gripper#MHF2 series
18-52.:KARMAN® Flow Controller 流量計/葉輪式流量傳感器-REGAL JOINT(RGL)#ALL series
18-53.:Inverter(Variable Frequency Driver/Intelligent Sensorless Vector Control)-HITACHI#SJ200 series
18-54.:Pilot/Direct Operated 2 Port Solenoid Valve-SMC#ALL series
18-55.:Mass Flow Meters(MFM) and Controllers(MFC)-KOFLOCK®#3810S/D3810/3810DS series
18-56.:Leakage(Leak) Sensors 漏液檢知器-T & T(Technical & Try/T&T)#LUP/KP/LSP/TFP-T/TFP-F/FD-2002-SR123 series
18-59.:Sensors/Motors センサ/モータ-NIDEC COPAL ELECTRONICS#ALL series
18-60.:HMI(Human Machine Interfaces) 人機介面-MITSUBISHI#GOT、Pro-face®、Hakko MONITOUCH#ALL series..
18-61.:Mass flow controller(MFC) 質量流量控制器-Hitachi Metals_SAM®、Aera®#ALL series
18-63.:TOSHIBA-Electromagnetic Contactor#CA/DA series・Electromagnetic Switch#MA/WA series
18-67.:Measurement and Control Gauge-KOBATA GAUGE MFG.#ALL series