Business Items 營業項目

02-01.:INSULATOR KAPTON SHEET..TEL#1A80-004208-12/1A80-004419-13/1A10-201474-11

品名(Description):INSULATOR KAPTON SHEET
材質(Material):DuPont™ Kapton® Polyimide Film
尺寸(Size):W620*L750*T0.075mm/ [(W841*L772)-(W615*L725)]*T0.125mm
原廠型號(OEM PN):TEL#1A80-004208-12/ 1A80-004419-13/ 1A10-201474-11
產品型號(WST PN):WST-AE.00S05.003:KAPTON SHEET..620*750*0.075mm..WST-QXI075/ WST-AE.00I02.001&2
備註(Note):G3 use with stocks=70pcs(WST-AE.00S05.003..T0.075mm)/ 8pcs(WST-AE.00I02.002..T0.125mm)..980527 update!
SPEC. link: "02. KAPTON®(PI),TEFLON® 絕緣膜片/膠帶"
* 本項產品可提供【零售小量庫存現品】,歡迎來電或信洽詢!

特別說明:本公司所代理銷售之所有KAPTON(PI)商品素材,均屬日本製杜邦DuPont™等級產品,且均已被廣泛使用於高科技產業領域、科學園區客戶並通過其相關驗證行之有年,決非一般市售之大陸素材,特此說明!

02-09.:NOZZLE LIP TAPE/Silicone Adhesive tape-CHANGJO(CHAN JO 創造)#HCT-940、HCT-940A..




Silicone Adhesive Tape: Y.EXP.EXPMATERIAL

Silicone Tape는 내약품성, 내열성, 점착도가 뛰어난 제품으로
박리후 잔사가 남지않으며 Masking부위를 이물질의 침투없이
안전하게 보호하는 우수성을 지니고 있다.
금도금, Soldering등에 주로 사용되고 다양한 점착력과 색상을
지니고있어 사용하고자하는 용도에 맞게 제작이 가능하다.

Silicone Tape is made for chemical proof, heat proof and
high level adhesive, and a prominent quality to prevent
from penetrating foreign material around Masking and
after taken off any residue is not remained.
It is used to get a golden plate and soldering, ect.
and It can be manufactured to apply to the customer's
requirement due to it's various kinds of adhesive and
color.

* Technical Data Sheet: Specification(SPEC.)、HCT-940HCT-940A
* PET film+Acrylic/Silicone adhesive: stock=T0.05mm*W45mm*L20m *1 Roll
1. PET film/Acrylic(normal) adhesive Temperature=100℃~120℃, with adhesive residue.
2. Silicone(special) adhesive Temperature=200℃~220℃, without adhesive residue(Non-residue).
3. For DRAAP1 use in "Slit-Die(夾縫式) coator head" at normal temperature for protection purpose, anti-static.

* Maker: CHANGJO COMPANY LTD. (創造) 창조산업주식회사

03-17.:QUARTZ CAP OF SCREW..

品名(Description):QUARTZ CAP OF SCREW
材質(Material):Quartz GE214LD+Ground Polish
尺寸(Size):Ø16*M12*H10.5*T6mm
原廠型號(OEM PN):TEL#
產品型號(WST PN):
備註(Note):use in TFT-LCD G3 fab. for Dry-Etching

03-18.:QUARTZ VIEW PORT WINDOW..TEL#1A10-402430(418117)-11/EP4-0

品名(Description):QUARTZ VIEW PORT WINDOW.EPD
材質(Material):Quartz,GE124
尺寸(Size):W75mm*L115mm*T5mm*C0.7mm、W116mm*L116mm*T8.0mm~T8.3mm、Ø50mm*T8mm..all +0.10mm/-0.15mm, 透明拋光、Ø171.45*Ø17.50*T12.92mm ...etc.
原廠型號(OEM PN):TEL#1A10-402430-11、TEL#1A10-418117-11、YAC#EP4-01590
產品型號(WSTech. PN):WST.92-0700032/1、WST-AE.00Q01.007、...
備註(Note):
1. For TFT-LCD G3~G8 fab in Dry-Etching use.
2. W116mm*L116mm*T8.0mm~T8.3mm with 4 pcs in Stock..2011/11/08.
3. W75mm*L115mm*T5mm*C0.7mm with 1 pc in Stock..2011/11/08.
 

03-19.:QUARTZ WINDOW PLATE..TEL#1A10-101936-11

品名(Description):QUARTZ WINDOW PLATE
材質(Material):Quartz,GE124
尺寸(Size):W375×L460×T30×R30mm,Ra0.4~0.6
原廠型號(OEM PN):TEL#1A10-101936-11
產品型號(WST PN):
備註(Note):with Stocks

03-21.:QUARTZ BAR/BLOCK..

品名(Description):QUARTZ BAR/BLOCK
材質(Material):Quartz,GE124
尺寸(Size):L367*W20*H20mm/ L499.85*W67*H20mm
原廠型號(OEM PN):TEL-ME450
產品型號(WST PN):WST.92-0700217 & WST.92-0700218
備註(Note):

04-01.:PLUG OF CLAMP..TEL#1A10-407411-11

品名(Description):PLUG OF CLAMP
材質(Material):Ceramic,Al2O3-AD99.5~7%
尺寸(Size):Ø11.9~ Ø9×L20mm
原廠型號(OEM PN):TEL#1A10-407411-11
產品型號(WST PN):WST.00P05.002
備註(Note):

04-02.:CERAMIC REGULATOR WALL..TEL#1A10-310828-11、1A10-310829-11

品名(Description):CERAMIC REGULATOR WALL of Clamp
材質(Material):Ceramic,Al2O3-AD99.5~7%
尺寸(Size):L643.85×T12×H75mm/ L740×T12×H75mm
原廠型號(OEM PN):TEL#1A10-310828-11、1A10-310829-11
產品型號(WST PN):WST-AE.00P04.014 & WST-AE.00P04.016
備註(Note):
   

04-04.:LOWER SHIELD RING(1)/(2)..TEL#1A10-311412/3-11

品名(Description):LOWER SHIELD RING(1)-SA/ (2)-SB
材質(Material):Ceramic,Al2O3-AD99.5~7%
尺寸(Size):L469.58*W123*/L428.45*W83.1 *T9.85mm
原廠型號(OEM PN):TEL#LE1A10-311412/3-11
產品型號(WST PN):
備註(Note):G2.5~3.5、G4~G7 for Lower-Electrode use.

  

04-05.:UPPER SHIELD RING..TEL#1A10-200807(8)-12(1)

品名(Description):UPPER SHIELD RING
材質(Material):Ceramic,Al2O3-AD99.5~7%
尺寸(Size):W155*W680 & W105*L490 ×T5mm
原廠型號(OEM PN):TEL-ME450#1A10-200807-12 / 1A10-200808-11
產品型號(WST PN):WST-92-0700009 & 10
備註(Note):for PE mode Upper-Electrode use.



  

04-06.:SHIELD RING BOTTOM..TEL#1A10-302709-11

品名(Description):SHIELD RING BOTTOM, LOWER側邊SHIELD RING
材質(Material):Ceramic,Al2O3-AD99.5~7%
尺寸(Size):WL563×T9.8mm/ H80*L555*T10mm
原廠型號(OEM PN):TEL-ME450#...、1A10-302709-11
產品型號(WST PN):WST-92-0700158 & WST-92-0700228
備註(Note):for PE mode Lower-Electrode use.


  

04-07.:UPPER SHIELD PLATE..TEL#1A10-100328-11

品名(Description):UPPER SHIELD PLATE
材質(Material):Ceramic,Al2O3-AD99.5~7%
尺寸(Size):W640×L640×T9.88mm
原廠型號(OEM PN):TEL-ME450#1A10-100328-11
產品型號(WST PN):WST.92-0700008
備註(Note):for RIE mode upper use.


  

04-08.:SHIELD RING LOWER..TEL#1A10-312819(20)-12(3)

品名(Description):SHIELD RING LOWER(1/2)-SA/SB
材質(Material):Ceramic,Al2O3-AD99.5~7%
尺寸(Size):WL288 & WL280.4×T9.85mm for G2.5、WL456 & WL537×T20mm for G3.5
原廠型號(OEM PN):TEL-ME450#1A10-312819-12/ LE1A10-312820-13、TEL#1A10-309316-12、1A10-309317-12
產品型號(WST PN):WST-92-0700200 & WST-92-0700201、WST.
備註(Note):for RIE mode Lower-Electrode use.

  

04-09.:CERAMIC CAP VAC M18..TEL#1A10-419286-13

品名(Description):CERAMIC CAP VAC M18 陶瓷螺絲帽蓋
材質(Material):Ceramic,Al2O3-AD99.5~7%
尺寸(Size):外Ø25~內M18*H11*T4mm
原廠型號(OEM PN):TEL#LE1A10-419286-13
產品型號(WSTech. PN):WST-AE.00S01.054
備註(Note):G5~G7-Upper Electrode 上電極部位,上部陶瓷條固定螺絲的陶瓷帽。

04-10.:CERAMIC COVER PLATE..TEL#1A10-..

品名(Description):CERAMIC COVER PLATE
材質(Material):Ceramic,Al2O3-AD99.5~7%
尺寸(Size):W32.2*L82*T2.18mm
原廠型號(OEM PN):TEL#
產品型號(WST PN):WST.
備註(Note):


  

04-11.:CERAMIC REMOVE BLOCK/SHEATHING..1A10-422182-12

品名(Description):CERAMIC REMOVE BLOCK/SHEATHING
材質(Material):Ceramic,Al2O3-AD99.5~7%
尺寸(Size):W30*L60*T9.55mm
原廠型號(OEM PN):TEL#
產品型號(WST PN):WST.
備註(Note):圓陶瓷cover for G6
1. TEL#1A10-422182-12 BLANK NUT..SE1500/Ø40mm

04-12.:CLAMP RING SET..TEL#1A10-..

品名(Description):CLAMP RING SET
材質(Material):Ceramic,Al2O3-AD99.5~7%
尺寸(Size):W912*L1074*T20mm、L782*W30.1*T17mm、L713*W25.1*T7.5mm、L713*W25.1*T7.5mm、L760*W35.1*T10.5mm、L700*W29.9*T10.5mm、L870*W23*T15mm、L760*W12.1*T30/15/60/75mm、L654*W12.1*T30/15/60mm、L654*W12.1*T75mm…etc.
原廠型號(OEM PN):TEL#1A10-313457-11、1A10-313458-11、1A10-313838-11、1A10-313839-11、1A85-008231-11、1A10-311733-11、1A10-310017-12、1A10-311733-11、1A10-311732-11、1A10-310018-11、1A10-311734-11…etc.
產品型號(WST PN):WST-Y
  
備註(Note):

1. TEL#1A10-209406-11: SHIELD,BASE(1)..MP-1800/W80*L1540*T30mm..for G6 use.
2. TEL#1A10-209407-11: SHIELD,BASE(2)..MP-1800/W140*L1910*T30mm..for G6 use...[J460]

04-13.:CERAMIC ADAPTER PLATE..TEL#1A10-209408~11-13

品名(Description):CERAMIC ADAPTER PLATE
材質(Material):Ceramic,Al2O3-AD99.5~7%
尺寸(Size):W34.4/W29*L762/L700*T10.5mm
原廠型號(OEM PN):TEL#
產品型號(WST PN):
備註(Note):
下部電極四周側壁陶瓷板 for G6

1. TEL#1A10-209408-13: SHIELD,SIDE(1)..MP-1800/W110*L970*T15mm
2. TEL#1A10-209409-13: SHIELD,SIDE(2)..MP-1800/W110*L900*T15mm
3. TEL#1A10-209410-13: SHIELD,SIDE(3)..MP-1800/W110*L970*T15mm
4. TEL#1A10-209411-13: SHIELD,SIDE(4)..MP-1800/W110*L900*T15mm

04-14.:CERAMIC SPACER BAR..TEL#1A10-327241-11、1A10-327242-11

品名(Description):CERAMIC SPACER BAR
材質(Material):Ceramic,Al2O3-AD99.5~7%
尺寸(Size):W23.2*L872*H15.2mm
原廠型號(OEM PN):TEL#
產品型號(WST PN):WST.
備註(Note):

1. TEL#1A10-327241-11: PLATE,BAFFLE ADAPTOR(1)..MP-1800 baffle 下面的支撐陶瓷條(長邊)/W20*L890*T10mm..for G6 use.
2. TEL#1A10-327242-11: PLATE,BAFFLE ADAPTER(2)..MP-1800 baffle 下面的支撐陶瓷條(短邊)/W20*L720*T10mm..for G6 use.

04-15.:CERAMIC PROTECT PLATE..1A10-209416~19-11

品名(Description):CERAMIC PROTECT PLATE
材質(Material):Ceramic,Al2O3-AD99.5~7%
尺寸(Size):
原廠型號(OEM PN):TEL#
產品型號(WST PN):WST.
備註(Note):上部電極四周陶瓷板 for G6

1. TEL#1A10-209416-11: PLATE,SHIELD U-1..MP1800ECCP/W110*L970*T15mm
2. TEL#1A10-209417-11: PLATE,SHIELD U-2..MP1800ECCP/W110*L900*T15mm
3. TEL#1A10-209418-11: PLATE,SHIELD U-3..MP1800ECCP/W110*L970*T15mm
4. TEL#1A10-209419-11: PLATE,SHIELD U-4..MP1800ECCP/W110*L900*T15mm

04-16.:CERAMIC CLAMP SUPPORTER..1A10-409754-11、1A10-430934-12

品名(Description):CERAMIC CLAMP SUPPORTER
材質(Material):Ceramic,Al2O3-AD99.5~7%
尺寸(Size):Ø17.8*L365/L254mm、
原廠型號(OEM PN):TEL#1A10-409754-11、1A10-430934-12
產品型號(WST PN):WST.00R10.001、
備註(Note):PILLAR,BAFFLE..MP-1800 baffle的支撐陶瓷棒/L30mm..for G6 use.

04-17.:CERAMIC VACUUM SCREW/Ceramic Screw 陶瓷(真空)螺絲..

品名(Description):CERAMIC VACUUM SCREW/Ceramic Screw 陶瓷(真空)螺絲
材質(Material):Ceramic,Al2O3-AD99.5~7%
尺寸(Size):by Customers
原廠型號(OEM PN):TEL#
產品型號(WST PN):WST.
備註(Note):

04-22.:CERAMIC CAP VAC M12..1A10-419302-13

品名(Description):CERAMIC CAP VAC M12 陶瓷螺絲帽蓋
材質(Material):Ceramic,Al2O3-AD99.5~7%
尺寸(Size):外Ø16.0~內M12*H10.5/H12.45*T4mm
原廠型號(OEM PN):TEL#LE1A10-419302-13
產品型號(WSTech. PN):WST-AE.00S01.055
備註(Note):G6-Inside Plate Liner 部位,側壁固定螺絲的陶瓷帽。[0.29-0.30]

04-23.:CERAMIC INSULATION SPACER 陶瓷絕緣墊片..UP-Z1-A001023/526

品名(Description):CERAMIC INSULATION SPACER 陶瓷絕緣墊片
材質(Material):Ceramic,Al2O3-AD99.5%
尺寸(Size):W26*L176*T(2+3+2)mm/ W26*L140*T(2+3+2)mm
原廠型號(OEM PN):UP-Z1-A001023/ UP-Z1-526140
產品型號(WSTech. PN):WST-AP320743/ WST-AP320742
備註(Note):use for CM-G7.5 from TTY, 一種濺鍍機的防著板結構,該濺鍍機包含有一向輸送帶結構及置物板方向濺鍍的濺鍍源、一輸送帶結構、數置物板及一由防著板構成的防著板結構,輸送帶上置放有置物板,而置物板上置放被鍍物,所述防著板結構位於輸送帶結構兩側;其特徵在於該防著板結構的防著板一體成型且有導軌。其中在濺鍍過程中,原子會往被鍍物方向沈積,因此也有可能沈積至防著板結構,所以濺鍍操作一段時間之後,相關的結構均須拆卸清除沈積物,本實用新型的防著板結構一體成型有導軌結構,據此,無論在拆、裝防著板結構後,就不用再拆、裝導軌結構,可以減少組、拆次數,節省人力,防著板結構的强度也相應較強。

 
* Ceramic Substrate 陶瓷基板
1. p/n#651-0270-910-00R..W27*L91*T0.635mm
2. p/n#651-0635-000-00R..W27*L61*T0.635mm

04-24.:INSULATION PEDESTAL 陶瓷絕緣墊塊..UP-Z1A-0942112

品名(Description):CERAMIC INSULATION PEDESTAL 陶瓷絕緣墊塊
材質(Material):Ceramic,Al2O3-AD99.6%
尺寸(Size):Ø42.1~Ø29*Ø9*H(5+7)mm
原廠型號(OEM PN):UP-Z1A-0942112
產品型號(WSTech. PN):WST-T-Z1A-0942112
備註(Note):use for CM-G7.5 from TTY

04-25.:CERAMIC BLOCK/Ceramic Gas Plate 陶瓷塞片/陶瓷氣板..

品名(Description):CERAMIC BLOCK/Ceramic Gas Plate 陶瓷塞片/陶瓷氣板
材質(Material):Ceramic,Al2O3-AD99.5~7%
尺寸(Size):W27.6×L64.3×T7mm-Ø5.6mm 2holes
原廠型號(OEM PN):
產品型號(WSTech. PN):
備註(Note):G6 for 04-04.:LOWER SHIELD RING with use.


* Ceramic Gas Plate 陶瓷氣板

04-26.:CERAMIC LIFTER/LIFT PIN 陶瓷頂針..TEL G6

品名(Description):CERAMIC LIFTER/QUARTZ/FIRST/LIFT PIN 陶瓷頂針
材質(Material):Ceramic-ZrO2+SUS316
尺寸(Size):SUS rod=L173mm*Ø4.65mm(including M4 screw)、ZrO2 rod=L102mm*Ø4.95mm;Total Length= L275mm
原廠型號(OEM PN):TEL#
產品型號(WSTech. PN):WST-AE.00P03.047(A)、WST-AE.00S29.003(B)
備註(Note):Dry-Etching of G6 use.
* WST-LEDEH112/A-00-09-00173..Lift Pin Ø3mm*L85mm for HDP-009 use.

04-28.:Ceramic COVER PLATE with GAS HOLES-1..


品名(Description):Ceramic COVER PLATE with GAS HOLES-1
材質(Material):Ceramic,Al2O3-AD99.5~7%
尺寸(Size):T50*W71*L71 mm
原廠型號(OEM PN):
產品型號(WST PN):
備註(Note):

04-29.:Ceramic COVER PLATE with GAS HOLES-2..


品名(Description):Ceramic COVER PLATE with GAS HOLES-2
材質(Material):Ceramic,Al2O3-AD99.5~7%
尺寸(Size):T50*W55*L19 mm
原廠型號(OEM PN):
產品型號(WST PN):
備註(Note):

06-07.:INSULATOR TEFLON SHEET/TEFLON tape 鐵氟龍膜片/膠帶..

品名(Description):INSULATOR TEFLON® SHEET/TEFLON tape 鐵氟龍膜片/膠帶
材質(Material):DuPont™ Teflon® filmNITOFLON®-NITTO DENKO CORPORATION 日東電工株式会社、CHUKOH CHEMICAL INDUSTRIES, LTD. 中興化成工業株式会社Saint-Gobain Performance Plastics, Paris-France ...etc.
尺寸(Size):W805*L815*T0.2mm/ [(W772*L841)-(W725*L615)]*T0.2mm/T0.08mm/T0.5mm...etc.,≤T2.0mm以上即為硬質板材。
原廠型號(OEM PN):TEL#
產品型號(WST PN):WST.00S05.001
備註(Note):耐溫度240℃~260℃,耐酸鹼抗化學特性佳、耐摩擦、耐電壓、具優異的不燃特性,規格及種類較少、市場流通性低、成本較高;Sheet/Film thickness from T0.025mm or T0.05mm/unit to T1 below. Plate is >T1mm.
背膠可選用SILICONE膠系(~170℃)或3M等級不殘膠系(~150℃)、耐高溫膠系(~250℃)。


TEFLON®: AFFEPFFRNXTPFAPTFETefzel® ETFEZonyl® PTFE ...etc.

06-09.:TEFLON BLANK..

品名(Description):TEFLON® BLANK
材質(Material):DuPont™ Teflon®
尺寸(Size):W9.72mm*L11.5mm*T7.77mm
原廠型號(OEM PN):TEL#
產品型號(WSTech. PN):
備註(Note):G6

08-01.:LOWER BUFFER PLATE SCREW..1A10-402712-11

品名(Description):LOWER BUFFER PLATE SCREW
材質(Material):SUS316
尺寸(Size):M3
原廠型號(OEM PN):TEL#1A10-402712-11
產品型號(WSTech. PN):WST.00S01.021
備註(Note):G3~G5 for 11-01.:BUFFER PLATE BOTTOM use

08-02.:SCREW BETWEEN CLAMP..1A10-410644-11

品名(Description):SCREW BETWEEN CLAMP
材質(Material):SUS316
尺寸(Size):M4~M6
原廠型號(OEM PN):TEL#1A10-410644-11
產品型號(WSTech. PN):WST.00S01.006
備註(Note):G3~G5 for 04-02.:REGULATOR WALL use

08-03.:L/L BUFFER PAD/SCREW..

品名(Description):L/L BUFFER PAD/SCREW
材質(Material):TEFLON®-PTFE/ POM/ PEEK®
尺寸(Size):M12*L8.4mm、M15*L26mm、M3*L8mm...etc.
原廠型號(OEM PN):TEL#、YAC#
產品型號(WSTech. PN):WST.00P03.028、..、..、..
備註(Note):可依需求將原材質TEFLON®更改為PEEK®材質以加強其耐溫性及機械強度減少Particle延長Life-time(另洽)

← Screw Pad:AL+Anodize(oxalic acid)

08-04.:BALL TRANSFER 萬向球..

品名(Description):BALL TRANSFER 萬向球
材質(Material):SUS+PBI
尺寸(Size):by Customers
原廠型號(OEM PN):YAC#
產品型號(WST PN):
備註(Note):
1. 圓滑的作動、定位精度高,不會刮傷玻璃面板表面,順利讓基板滑動。
2. 動作性靈敏、操作時間能縮短,僅需傳統的Pin支撐方式1/10以下的推力即可完成微調整作業。
3. 擁有長期安定的摩擦抵抗來完成玻璃基板的微調作業,效率及良率均能夠提高,可改善因磨耗而必須經常性更換接觸部零件(Pin)的作業問題。
4. 採用絕緣材質,可有效防止ESD及Partical issue,加上使用高機能性樹脂材料讓摩擦係數及發塵量(Powder)最低最小。
5. 一般狀況使用下,每月月保養以IPA擦拭球體即可達到清潔。

選用本產品需確定事項
1. 型式:螺絲型(Screw Pin)or 基座型(Seat)?
2. 材質:球體(Ball)、主體(Body)、防塵蓋(Cap)? 工程塑膠類、陶瓷類、金屬類...etc.
3. 尺寸:球體(Ball)直徑Ø、主體(Body)最大外徑Ø、螺牙(Screw)規格M*間距P*長度L or 螺孔(Hole)尺寸Ø、主體(Body)長度L or 高度H...etc.
4. 使用機台名稱及部位?
5. 使用環境接觸之氣/液體或化學品(Chemical)?需耐酸/鹼?
6. 使用溫度?
7. 使用等級?(採購價位)

08-05.:M12 SUS VACUUM SCREW 真空螺絲..

品名(Description):M12 SUS VACUUM SCREW 真空螺絲
材質(Material):SUS316
尺寸(Size):M12
原廠型號(OEM PN):TEL#
產品型號(WSTech. PN):
備註(Note):G5、G6 for Inside Plate Liner use with 04-22.:CERAMIC CAP for M12 screw

08-06.:M18 SUS VACUUM SCREW 真空螺絲..

品名(Description):M18 SUS VACUUM SCREW 真空螺絲
材質(Material):SUS316
尺寸(Size):M18
原廠型號(OEM PN):TEL#
產品型號(WSTech. PN):
備註(Note):G5、G6 for Upper Electrode use with 04-09.:CERAMIC CAP for M18 screw

10-01.:SENSOR COVER..1A10-410576-11

品名(Description):SENSOR COVER
材質(Material):AL6061+anodize
尺寸(Size):Ø52.3~Ø22.2×H49.5mm
原廠型號(OEM PN):TEL#1A10-410576-11
產品型號(WST PN):WST.00C23.004
備註(Note):

10-02.:EPD WINDOW COVER..1A10-309162-11

品名(Description):EPD WINDOW COVER
材質(Material):AL6061+anodize
尺寸(Size):L118*W78*H49.4mm
原廠型號(OEM PN):TEL#1A10-309162-11
產品型號(WST PN):WST.00C23.001
備註(Note):

10-03.:INSIDE PLATE..1A10-xxxxxx-11/2

品名(Description):INSIDE PLATE
材質(Material):AL6061+anodize
尺寸(Size):W116.7*L1024*T5/ W130*L116.3*T2/ W81.8*L840*T5mm/ W106*L810*T2/ W139*L900*T2mm
原廠型號(OEM PN):TEL#1A10-311398-11/ 1A10-413149-11/ 1A10-311399-11/ 1A10-309705-12/ 1A10-309775-12
產品型號(WST PN):WST.00P04.027~31
備註(Note):without Stocks

10-04.:GATE DOOR COVER/LINER..1A10-309689-11

品名(Description):GATE DOOR COVER/LINER
材質(Material):AL6061+anodize
尺寸(Size):
原廠型號(OEM PN):TEL#1A10-309689-11
產品型號(WST PN):WST-AE.00S05.001/ WST-AE.00P04.075/ WST-AE.00P04.076
備註(Note):G3

10-05.:UPPER ELECTRODE,AL..1A10-201474-11

品名(Description):UPPER ELECTRODE,AL
材質(Material):AL6061+Vitriol Anodized
尺寸(Size):T6mm
原廠型號(OEM PN):TEL#1A10-201474-11
產品型號(WST PN):WST.00B08.005/ WST-92-0700068
備註(Note):G3~G8

10-06.:SCREW PROTECTION CAP, AL+Anodize..


品名(Description):SCREW PROTECTION CAP, AL+Anodize
材質(Material):Alumina+Anodize
尺寸(Size):Ø15*Ø6*L8 mm
原廠型號(OEM PN):-
產品型號(WST PN):-
備註(Note):

11-01.:BUFFER PLATE BOTTOM..1A10-312766/7-11

品名(Description):BUFFER PLATE BOTTOM_1 & 2
材質(Material):SUS316
尺寸(Size):
原廠型號(OEM PN):TEL#1A10-312766/7-11
產品型號(WST PN):WST.00B11.003/ 004
備註(Note):for G3 Dry-Etching use from AL+anodize to SUS316, extend life-time and reduce re-anodized

14-02.:GEAR RACK-SS1800..1A02-400720-12

品名(Description):GEAR RACK-SS1800
材質(Material):Nylon(MC)、PVDF
尺寸(Size):W15*L38*H17.5mm
原廠型號(OEM PN):TEL#LE1A02-400720-12
產品型號(WST PN):WST.00G03.001
備註(Note):G6

17-03.:LIFT PIN 頂針 for TEL G2.5~G3.5..1A10-333393-11/1A10-327376-12

品名(Description):LIFT PIN 頂針/PIN,LIFTER(C) VP/PIN,LIFTER(E)
材質(Material):DuPont™ Vespel® SP-1、PBI、CEPLA®
尺寸(Size):OD2.5~3.5mm*L150~175mmØ4.45mm*L246mm(PBI) ...etc.
原廠型號(OEM PN):TEL#1A10-333393-11、1A10-327376-12
產品型號(WST PN):WST.00P03.017/ WST.00TP03.026
備註(Note):G2.5~G3.5 for MP1800

17-08.:SECOND/2nd PAD(PIN TWO PAD)..1A10-420910-11

品名(Description):SECOND/2nd PAD(PIN TWO PAD); PAD,CATCH PLATE..SS1800
材質(Material):Vespel®/ PBI®
尺寸(Size):Ver.1=Ø10.82*H9.55mm、Ver.2=外Ø10.82*高H9.55*頂部導角R1.0/ SUS止付螺絲=M3*深L8.5mm
原廠型號(OEM PN):TEL#LE1A10-420910-11
產品型號(WST PN):WST.00P01.028、WST.00P01.013
備註(Note):G6 use in Robot Plate

17-09.:WASHER,Vespel®..

品名(Description):WASHER
材質(Material):DuPont™ Vespel®
尺寸(Size):外Ø12.45*內Ø5.4*厚T3.47mm
原廠型號(OEM PN):TEL#
產品型號(WST PN):
備註(Note):G6 in Vacuum-machine

17-17.:LIFT SUPPORT PIN,DuPont™ Vespel® SP-1..1A10-327278-12

品名(Description):LIFT SUPPORT PIN
材質(Material):DuPont™ Vespel® SP-1
尺寸(Size):OD3.43~3.78mm*L167~176.5mm
原廠型號(OEM PN):TEL#1A10-327278-12
產品型號(WST PN):WST.TBW
備註(Note):G2.5~G3.5

17-20.:Vespel SCREW..


品名(Description):Vespel SCREW
材質(Material):DuPont™ Vespel®
尺寸(Size):Ø13*M5*L29 mm
原廠型號(OEM PN):
產品型號(WST PN):
備註(Note):

17-21.:Vespel PROTECTION CAP with 4 GAS HOLES..


品名(Description):Vespel PROTECTION CAP with 4 GAS HOLES
材質(Material):DuPont™ Vespel®
尺寸(Size):Ø10*Ø6*L9 mm
原廠型號(OEM PN):
產品型號(WST PN):
備註(Note):