Business Items 营业项目

02-01.:INSULATOR KAPTON SHEET..TEL#1A80-004208-12/1A80-004419-13/1A10-201474-11

品名(Description):INSULATOR KAPTON SHEET
材质(Material):DuPont™ Kapton® Polyimide Film
尺寸(Size):W620*L750*T0.075mm/ [(W841*L772)-(W615*L725)]*T0.125mm
原厂型号(OEM PN):TEL#1A80-004208-12/ 1A80-004419-13/ 1A10-201474-11
产品型号(WST PN):WST-AE.00S05.003:KAPTON SHEET..620*750*0.075mm..WST-QXI075/ WST-AE.00I02.001&2
备注(Note):G3 use with stocks=70pcs(WST-AE.00S05.003..T0.075mm)/ 8pcs(WST-AE.00I02.002..T0.125mm)..980527 update!
SPEC. link: "02. KAPTON®(PI),TEFLON® 绝缘膜片/胶带"
* 本项产品可提供【零售小量库存现品】,欢迎来电或信洽询!

特别说明:本公司所代理销售之所有KAPTON(PI)商品素材,均属日本制杜邦DuPont™等级产品,且均已被广泛使用於高科技产业领域、科学园区客户并通过其相关验证行之有年,决非一般市售之大陆素材,特此说明!

02-09.:NOZZLE LIP TAPE/Silicone Adhesive tape-CHANGJO(CHAN JO 创造)#HCT-940、HCT-940A..




Silicone Adhesive Tape: Y.EXP.EXPMATERIAL

Silicone Tape는 내약품성, 내열성, 점착도가 뛰어난 제품으로
박리후 잔사가 남지않으며 Masking부위를 이물질의 침투없이
안전하게 보호하는 우수성을 지니고 있다.
금도금, Soldering등에 주로 사용되고 다양한 점착력과 색상을
지니고있어 사용하고자하는 용도에 맞게 제작이 가능하다.

Silicone Tape is made for chemical proof, heat proof and
high level adhesive, and a prominent quality to prevent
from penetrating foreign material around Masking and
after taken off any residue is not remained.
It is used to get a golden plate and soldering, ect.
and It can be manufactured to apply to the customer's
requirement due to it's various kinds of adhesive and
color.

* Technical Data Sheet: Specification(SPEC.)、HCT-940HCT-940A
* PET film+Acrylic/Silicone adhesive: stock=T0.05mm*W45mm*L20m *1 Roll
1. PET film/Acrylic(normal) adhesive Temperature=100℃~120℃, with adhesive residue.
2. Silicone(special) adhesive Temperature=200℃~220℃, without adhesive residue(Non-residue).
3. For DRAAP1 use in "Slit-Die(夹缝式) coator head" at normal temperature for protection purpose, anti-static.

* Maker: CHANGJO COMPANY LTD. (创造) 창조산업주식회사

03-17.:QUARTZ CAP OF SCREW..

品名(Description):QUARTZ CAP OF SCREW
材质(Material):Quartz GE214LD+Ground Polish
尺寸(Size):Ø16*M12*H10.5*T6mm
原厂型号(OEM PN):TEL#
产品型号(WST PN):
备注(Note):use in TFT-LCD G3 fab. for Dry-Etching

03-18.:QUARTZ VIEW PORT WINDOW..TEL#1A10-402430(418117)-11/EP4-0

品名(Description):QUARTZ VIEW PORT WINDOW.EPD
材质(Material):Quartz,GE124
尺寸(Size):W75mm*L115mm*T5mm*C0.7mm、W116mm*L116mm*T8.0mm~T8.3mm、Ø50mm*T8mm..all +0.10mm/-0.15mm, 透明抛光、Ø171.45*Ø17.50*T12.92mm ...etc.
原厂型号(OEM PN):TEL#1A10-402430-11、TEL#1A10-418117-11、YAC#EP4-01590
产品型号(WSTech. PN):WST.92-0700032/1、WST-AE.00Q01.007、...
备注(Note):
1. For TFT-LCD G3~G8 fab in Dry-Etching use.
2. W116mm*L116mm*T8.0mm~T8.3mm with 4 pcs in Stock..2011/11/08.
3. W75mm*L115mm*T5mm*C0.7mm with 1 pc in Stock..2011/11/08.
 

03-19.:QUARTZ WINDOW PLATE..TEL#1A10-101936-11

品名(Description):QUARTZ WINDOW PLATE
材质(Material):Quartz,GE124
尺寸(Size):W375×L460×T30×R30mm,Ra0.4~0.6
原厂型号(OEM PN):TEL#1A10-101936-11
产品型号(WST PN):
备注(Note):with Stocks

03-21.:QUARTZ BAR/BLOCK..

品名(Description):QUARTZ BAR/BLOCK
材质(Material):Quartz,GE124
尺寸(Size):L367*W20*H20mm/ L499.85*W67*H20mm
原厂型号(OEM PN):TEL-ME450
产品型号(WST PN):WST.92-0700217 & WST.92-0700218
备注(Note):

04-01.:PLUG OF CLAMP..TEL#1A10-407411-11

品名(Description):PLUG OF CLAMP
材质(Material):Ceramic,Al2O3-AD99.5~7%
尺寸(Size):Ø11.9~ Ø9×L20mm
原厂型号(OEM PN):TEL#1A10-407411-11
产品型号(WST PN):WST.00P05.002
备注(Note):

04-02.:CERAMIC REGULATOR WALL..TEL#1A10-310828-11、1A10-310829-11

品名(Description):CERAMIC REGULATOR WALL of Clamp
材质(Material):Ceramic,Al2O3-AD99.5~7%
尺寸(Size):L643.85×T12×H75mm/ L740×T12×H75mm
原厂型号(OEM PN):TEL#1A10-310828-11、1A10-310829-11
产品型号(WST PN):WST-AE.00P04.014 & WST-AE.00P04.016
备注(Note):
   

04-04.:LOWER SHIELD RING(1)/(2)..TEL#1A10-311412/3-11

品名(Description):LOWER SHIELD RING(1)-SA/ (2)-SB
材质(Material):Ceramic,Al2O3-AD99.5~7%
尺寸(Size):L469.58*W123*/L428.45*W83.1 *T9.85mm
原厂型号(OEM PN):TEL#LE1A10-311412/3-11
产品型号(WST PN):
备注(Note):G2.5~3.5、G4~G7 for Lower-Electrode use.

  

04-05.:UPPER SHIELD RING..TEL#1A10-200807(8)-12(1)

品名(Description):UPPER SHIELD RING
材质(Material):Ceramic,Al2O3-AD99.5~7%
尺寸(Size):W155*W680 & W105*L490 ×T5mm
原厂型号(OEM PN):TEL-ME450#1A10-200807-12 / 1A10-200808-11
产品型号(WST PN):WST-92-0700009 & 10
备注(Note):for PE mode Upper-Electrode use.



  

04-06.:SHIELD RING BOTTOM..TEL#1A10-302709-11

品名(Description):SHIELD RING BOTTOM, LOWER侧边SHIELD RING
材质(Material):Ceramic,Al2O3-AD99.5~7%
尺寸(Size):WL563×T9.8mm/ H80*L555*T10mm
原厂型号(OEM PN):TEL-ME450#...、1A10-302709-11
产品型号(WST PN):WST-92-0700158 & WST-92-0700228
备注(Note):for PE mode Lower-Electrode use.


  

04-07.:UPPER SHIELD PLATE..TEL#1A10-100328-11

品名(Description):UPPER SHIELD PLATE
材质(Material):Ceramic,Al2O3-AD99.5~7%
尺寸(Size):W640×L640×T9.88mm
原厂型号(OEM PN):TEL-ME450#1A10-100328-11
产品型号(WST PN):WST.92-0700008
备注(Note):for RIE mode upper use.


  

04-08.:SHIELD RING LOWER..TEL#1A10-312819(20)-12(3)

品名(Description):SHIELD RING LOWER(1/2)-SA/SB
材质(Material):Ceramic,Al2O3-AD99.5~7%
尺寸(Size):WL288 & WL280.4×T9.85mm for G2.5、WL456 & WL537×T20mm for G3.5
原厂型号(OEM PN):TEL-ME450#1A10-312819-12/ LE1A10-312820-13、TEL#1A10-309316-12、1A10-309317-12
产品型号(WST PN):WST-92-0700200 & WST-92-0700201、WST.
备注(Note):for RIE mode Lower-Electrode use.

  

04-09.:CERAMIC CAP VAC M18..TEL#1A10-419286-13

品名(Description):CERAMIC CAP VAC M18 陶瓷螺丝帽盖
材质(Material):Ceramic,Al2O3-AD99.5~7%
尺寸(Size):外Ø25~内M18*H11*T4mm
原厂型号(OEM PN):TEL#LE1A10-419286-13
产品型号(WSTech. PN):WST-AE.00S01.054
备注(Note):G5~G7-Upper Electrode 上电极部位,上部陶瓷条固定螺丝的陶瓷帽。

04-10.:CERAMIC COVER PLATE..TEL#1A10-..

品名(Description):CERAMIC COVER PLATE
材质(Material):Ceramic,Al2O3-AD99.5~7%
尺寸(Size):W32.2*L82*T2.18mm
原厂型号(OEM PN):TEL#
产品型号(WST PN):WST.
备注(Note):


  

04-11.:CERAMIC REMOVE BLOCK/SHEATHING..1A10-422182-12

品名(Description):CERAMIC REMOVE BLOCK/SHEATHING
材质(Material):Ceramic,Al2O3-AD99.5~7%
尺寸(Size):W30*L60*T9.55mm
原厂型号(OEM PN):TEL#
产品型号(WST PN):WST.
备注(Note):圆陶瓷cover for G6
1. TEL#1A10-422182-12 BLANK NUT..SE1500/Ø40mm

04-12.:CLAMP RING SET..TEL#1A10-..

品名(Description):CLAMP RING SET
材质(Material):Ceramic,Al2O3-AD99.5~7%
尺寸(Size):W912*L1074*T20mm、L782*W30.1*T17mm、L713*W25.1*T7.5mm、L713*W25.1*T7.5mm、L760*W35.1*T10.5mm、L700*W29.9*T10.5mm、L870*W23*T15mm、L760*W12.1*T30/15/60/75mm、L654*W12.1*T30/15/60mm、L654*W12.1*T75mm…etc.
原厂型号(OEM PN):TEL#1A10-313457-11、1A10-313458-11、1A10-313838-11、1A10-313839-11、1A85-008231-11、1A10-311733-11、1A10-310017-12、1A10-311733-11、1A10-311732-11、1A10-310018-11、1A10-311734-11…etc.
产品型号(WST PN):WST-Y
  
备注(Note):

1. TEL#1A10-209406-11: SHIELD,BASE(1)..MP-1800/W80*L1540*T30mm..for G6 use.
2. TEL#1A10-209407-11: SHIELD,BASE(2)..MP-1800/W140*L1910*T30mm..for G6 use...[J460]

04-13.:CERAMIC ADAPTER PLATE..TEL#1A10-209408~11-13

品名(Description):CERAMIC ADAPTER PLATE
材质(Material):Ceramic,Al2O3-AD99.5~7%
尺寸(Size):W34.4/W29*L762/L700*T10.5mm
原厂型号(OEM PN):TEL#
产品型号(WST PN):
备注(Note):
下部电极四周侧壁陶瓷板 for G6

1. TEL#1A10-209408-13: SHIELD,SIDE(1)..MP-1800/W110*L970*T15mm
2. TEL#1A10-209409-13: SHIELD,SIDE(2)..MP-1800/W110*L900*T15mm
3. TEL#1A10-209410-13: SHIELD,SIDE(3)..MP-1800/W110*L970*T15mm
4. TEL#1A10-209411-13: SHIELD,SIDE(4)..MP-1800/W110*L900*T15mm

04-14.:CERAMIC SPACER BAR..TEL#1A10-327241-11、1A10-327242-11

品名(Description):CERAMIC SPACER BAR
材质(Material):Ceramic,Al2O3-AD99.5~7%
尺寸(Size):W23.2*L872*H15.2mm
原厂型号(OEM PN):TEL#
产品型号(WST PN):WST.
备注(Note):

1. TEL#1A10-327241-11: PLATE,BAFFLE ADAPTOR(1)..MP-1800 baffle 下面的支撑陶瓷条(长边)/W20*L890*T10mm..for G6 use.
2. TEL#1A10-327242-11: PLATE,BAFFLE ADAPTER(2)..MP-1800 baffle 下面的支撑陶瓷条(短边)/W20*L720*T10mm..for G6 use.

04-15.:CERAMIC PROTECT PLATE..1A10-209416~19-11

品名(Description):CERAMIC PROTECT PLATE
材质(Material):Ceramic,Al2O3-AD99.5~7%
尺寸(Size):
原厂型号(OEM PN):TEL#
产品型号(WST PN):WST.
备注(Note):上部电极四周陶瓷板 for G6

1. TEL#1A10-209416-11: PLATE,SHIELD U-1..MP1800ECCP/W110*L970*T15mm
2. TEL#1A10-209417-11: PLATE,SHIELD U-2..MP1800ECCP/W110*L900*T15mm
3. TEL#1A10-209418-11: PLATE,SHIELD U-3..MP1800ECCP/W110*L970*T15mm
4. TEL#1A10-209419-11: PLATE,SHIELD U-4..MP1800ECCP/W110*L900*T15mm

04-16.:CERAMIC CLAMP SUPPORTER..1A10-409754-11、1A10-430934-12

品名(Description):CERAMIC CLAMP SUPPORTER
材质(Material):Ceramic,Al2O3-AD99.5~7%
尺寸(Size):Ø17.8*L365/L254mm、
原厂型号(OEM PN):TEL#1A10-409754-11、1A10-430934-12
产品型号(WST PN):WST.00R10.001、
备注(Note):PILLAR,BAFFLE..MP-1800 baffle的支撑陶瓷棒/L30mm..for G6 use.

04-17.:CERAMIC VACUUM SCREW/Ceramic Screw 陶瓷(真空)螺丝..

品名(Description):CERAMIC VACUUM SCREW/Ceramic Screw 陶瓷(真空)螺丝
材质(Material):Ceramic,Al2O3-AD99.5~7%
尺寸(Size):by Customers
原厂型号(OEM PN):TEL#
产品型号(WST PN):WST.
备注(Note):

04-22.:CERAMIC CAP VAC M12..1A10-419302-13

品名(Description):CERAMIC CAP VAC M12 陶瓷螺丝帽盖
材质(Material):Ceramic,Al2O3-AD99.5~7%
尺寸(Size):外Ø16.0~内M12*H10.5/H12.45*T4mm
原厂型号(OEM PN):TEL#LE1A10-419302-13
产品型号(WSTech. PN):WST-AE.00S01.055
备注(Note):G6-Inside Plate Liner 部位,侧壁固定螺丝的陶瓷帽。[0.29-0.30]

04-23.:CERAMIC INSULATION SPACER 陶瓷绝缘垫片..UP-Z1-A001023/526

品名(Description):CERAMIC INSULATION SPACER 陶瓷绝缘垫片
材质(Material):Ceramic,Al2O3-AD99.5%
尺寸(Size):W26*L176*T(2+3+2)mm/ W26*L140*T(2+3+2)mm
原厂型号(OEM PN):UP-Z1-A001023/ UP-Z1-526140
产品型号(WSTech. PN):WST-AP320743/ WST-AP320742
备注(Note):use for CM-G7.5 from TTY, 一种溅镀机的防著板结构,该溅镀机包含有一向输送带结构及置物板方向溅镀的溅镀源、一输送带结构、数置物板及一由防著板构成的防著板结构,输送带上置放有置物板,而置物板上置放被镀物,所述防著板结构位於输送带结构两侧;其特徵在於该防著板结构的防著板一体成型且有导轨。其中在溅镀过程中,原子会往被镀物方向沈积,因此也有可能沈积至防著板结构,所以溅镀操作一段时间之后,相关的结构均须拆卸清除沈积物,本实用新型的防著板结构一体成型有导轨结构,据此,无论在拆、装防著板结构后,就不用再拆、装导轨结构,可以减少组、拆次数,节省人力,防著板结构的强度也相应较强。

 
* Ceramic Substrate 陶瓷基板
1. p/n#651-0270-910-00R..W27*L91*T0.635mm
2. p/n#651-0635-000-00R..W27*L61*T0.635mm

04-24.:INSULATION PEDESTAL 陶瓷绝缘垫块..UP-Z1A-0942112

品名(Description):CERAMIC INSULATION PEDESTAL 陶瓷绝缘垫块
材质(Material):Ceramic,Al2O3-AD99.6%
尺寸(Size):Ø42.1~Ø29*Ø9*H(5+7)mm
原厂型号(OEM PN):UP-Z1A-0942112
产品型号(WSTech. PN):WST-T-Z1A-0942112
备注(Note):use for CM-G7.5 from TTY

04-25.:CERAMIC BLOCK/Ceramic Gas Plate 陶瓷塞片/陶瓷气板..

品名(Description):CERAMIC BLOCK/Ceramic Gas Plate 陶瓷塞片/陶瓷气板
材质(Material):Ceramic,Al2O3-AD99.5~7%
尺寸(Size):W27.6×L64.3×T7mm-Ø5.6mm 2holes
原厂型号(OEM PN):
产品型号(WSTech. PN):
备注(Note):G6 for 04-04.:LOWER SHIELD RING with use.


* Ceramic Gas Plate 陶瓷气板

04-26.:CERAMIC LIFTER/LIFT PIN 陶瓷顶针..TEL G6

品名(Description):CERAMIC LIFTER/QUARTZ/FIRST/LIFT PIN 陶瓷顶针
材质(Material):Ceramic-ZrO2+SUS316
尺寸(Size):SUS rod=L173mm*Ø4.65mm(including M4 screw)、ZrO2 rod=L102mm*Ø4.95mm;Total Length= L275mm
原厂型号(OEM PN):TEL#
产品型号(WSTech. PN):WST-AE.00P03.047(A)、WST-AE.00S29.003(B)
备注(Note):Dry-Etching of G6 use.
* WST-LEDEH112/A-00-09-00173..Lift Pin Ø3mm*L85mm for HDP-009 use.

04-28.:Ceramic COVER PLATE with GAS HOLES-1..


品名(Description):Ceramic COVER PLATE with GAS HOLES-1
材质(Material):Ceramic,Al2O3-AD99.5~7%
尺寸(Size):T50*W71*L71 mm
原厂型号(OEM PN):
产品型号(WST PN):
备注(Note):

04-29.:Ceramic COVER PLATE with GAS HOLES-2..


品名(Description):Ceramic COVER PLATE with GAS HOLES-2
材质(Material):Ceramic,Al2O3-AD99.5~7%
尺寸(Size):T50*W55*L19 mm
原厂型号(OEM PN):
产品型号(WST PN):
备注(Note):

06-07.:INSULATOR TEFLON SHEET/TEFLON tape 铁氟龙膜片/胶带..

品名(Description):INSULATOR TEFLON® SHEET/TEFLON tape 铁氟龙膜片/胶带
材质(Material):DuPont™ Teflon® filmNITOFLON®-NITTO DENKO CORPORATION 日东电工株式会社、CHUKOH CHEMICAL INDUSTRIES, LTD. 中兴化成工业株式会社Saint-Gobain Performance Plastics, Paris-France ...etc.
尺寸(Size):W805*L815*T0.2mm/ [(W772*L841)-(W725*L615)]*T0.2mm/T0.08mm/T0.5mm...etc.,≤T2.0mm以上即为硬质板材。
原厂型号(OEM PN):TEL#
产品型号(WST PN):WST.00S05.001
备注(Note):耐温度240℃~260℃,耐酸硷抗化学特性佳、耐摩擦、耐电压、具优异的不燃特性,规格及种类较少、市场流通性低、成本较高;Sheet/Film thickness from T0.025mm or T0.05mm/unit to T1 below. Plate is >T1mm.
背胶可选用SILICONE胶系(~170℃)或3M等级不残胶系(~150℃)、耐高温胶系(~250℃)。


TEFLON®: AFFEPFFRNXTPFAPTFETefzel® ETFEZonyl® PTFE ...etc.

06-09.:TEFLON BLANK..

品名(Description):TEFLON® BLANK
材质(Material):DuPont™ Teflon®
尺寸(Size):W9.72mm*L11.5mm*T7.77mm
原厂型号(OEM PN):TEL#
产品型号(WSTech. PN):
备注(Note):G6

08-01.:LOWER BUFFER PLATE SCREW..1A10-402712-11

品名(Description):LOWER BUFFER PLATE SCREW
材质(Material):SUS316
尺寸(Size):M3
原厂型号(OEM PN):TEL#1A10-402712-11
产品型号(WSTech. PN):WST.00S01.021
备注(Note):G3~G5 for 11-01.:BUFFER PLATE BOTTOM use

08-02.:SCREW BETWEEN CLAMP..1A10-410644-11

品名(Description):SCREW BETWEEN CLAMP
材质(Material):SUS316
尺寸(Size):M4~M6
原厂型号(OEM PN):TEL#1A10-410644-11
产品型号(WSTech. PN):WST.00S01.006
备注(Note):G3~G5 for 04-02.:REGULATOR WALL use

08-03.:L/L BUFFER PAD/SCREW..

品名(Description):L/L BUFFER PAD/SCREW
材质(Material):TEFLON®-PTFE/ POM/ PEEK®
尺寸(Size):M12*L8.4mm、M15*L26mm、M3*L8mm...etc.
原厂型号(OEM PN):TEL#、YAC#
产品型号(WSTech. PN):WST.00P03.028、..、..、..
备注(Note):可依需求将原材质TEFLON®更改为PEEK®材质以加强其耐温性及机械强度减少Particle延长Life-time(另洽)

← Screw Pad:AL+Anodize(oxalic acid)

08-04.:BALL TRANSFER 万向球..

品名(Description):BALL TRANSFER 万向球
材质(Material):SUS+PBI
尺寸(Size):by Customers
原厂型号(OEM PN):YAC#
产品型号(WST PN):
备注(Note):
1. 圆滑的作动、定位精度高,不会刮伤玻璃面板表面,顺利让基板滑动。
2. 动作性灵敏、操作时间能缩短,仅需传统的Pin支撑方式1/10以下的推力即可完成微调整作业。
3. 拥有长期安定的摩擦抵抗来完成玻璃基板的微调作业,效率及良率均能够提高,可改善因磨耗而必须经常性更换接触部零件(Pin)的作业问题。
4. 采用绝缘材质,可有效防止ESD及Partical issue,加上使用高机能性树脂材料让摩擦系数及发尘量(Powder)最低最小。
5. 一般状况使用下,每月月保养以IPA擦拭球体即可达到清洁。

选用本产品需确定事项
1. 型式:螺丝型(Screw Pin)or 基座型(Seat)?
2. 材质:球体(Ball)、主体(Body)、防尘盖(Cap)? 工程塑胶类、陶瓷类、金属类...etc.
3. 尺寸:球体(Ball)直径Ø、主体(Body)最大外径Ø、螺牙(Screw)规格M*间距P*长度L or 螺孔(Hole)尺寸Ø、主体(Body)长度L or 高度H...etc.
4. 使用机台名称及部位?
5. 使用环境接触之气/液体或化学品(Chemical)?需耐酸/硷?
6. 使用温度?
7. 使用等级?(采购价位)

08-05.:M12 SUS VACUUM SCREW 真空螺丝..

品名(Description):M12 SUS VACUUM SCREW 真空螺丝
材质(Material):SUS316
尺寸(Size):M12
原厂型号(OEM PN):TEL#
产品型号(WSTech. PN):
备注(Note):G5、G6 for Inside Plate Liner use with 04-22.:CERAMIC CAP for M12 screw

08-06.:M18 SUS VACUUM SCREW 真空螺丝..

品名(Description):M18 SUS VACUUM SCREW 真空螺丝
材质(Material):SUS316
尺寸(Size):M18
原厂型号(OEM PN):TEL#
产品型号(WSTech. PN):
备注(Note):G5、G6 for Upper Electrode use with 04-09.:CERAMIC CAP for M18 screw

10-01.:SENSOR COVER..1A10-410576-11

品名(Description):SENSOR COVER
材质(Material):AL6061+anodize
尺寸(Size):Ø52.3~Ø22.2×H49.5mm
原厂型号(OEM PN):TEL#1A10-410576-11
产品型号(WST PN):WST.00C23.004
备注(Note):

10-02.:EPD WINDOW COVER..1A10-309162-11

品名(Description):EPD WINDOW COVER
材质(Material):AL6061+anodize
尺寸(Size):L118*W78*H49.4mm
原厂型号(OEM PN):TEL#1A10-309162-11
产品型号(WST PN):WST.00C23.001
备注(Note):

10-03.:INSIDE PLATE..1A10-xxxxxx-11/2

品名(Description):INSIDE PLATE
材质(Material):AL6061+anodize
尺寸(Size):W116.7*L1024*T5/ W130*L116.3*T2/ W81.8*L840*T5mm/ W106*L810*T2/ W139*L900*T2mm
原厂型号(OEM PN):TEL#1A10-311398-11/ 1A10-413149-11/ 1A10-311399-11/ 1A10-309705-12/ 1A10-309775-12
产品型号(WST PN):WST.00P04.027~31
备注(Note):without Stocks

10-04.:GATE DOOR COVER/LINER..1A10-309689-11

品名(Description):GATE DOOR COVER/LINER
材质(Material):AL6061+anodize
尺寸(Size):
原厂型号(OEM PN):TEL#1A10-309689-11
产品型号(WST PN):WST-AE.00S05.001/ WST-AE.00P04.075/ WST-AE.00P04.076
备注(Note):G3

10-05.:UPPER ELECTRODE,AL..1A10-201474-11

品名(Description):UPPER ELECTRODE,AL
材质(Material):AL6061+Vitriol Anodized
尺寸(Size):T6mm
原厂型号(OEM PN):TEL#1A10-201474-11
产品型号(WST PN):WST.00B08.005/ WST-92-0700068
备注(Note):G3~G8

10-06.:SCREW PROTECTION CAP, AL+Anodize..


品名(Description):SCREW PROTECTION CAP, AL+Anodize
材质(Material):Alumina+Anodize
尺寸(Size):Ø15*Ø6*L8 mm
原厂型号(OEM PN):-
产品型号(WST PN):-
备注(Note):

11-01.:BUFFER PLATE BOTTOM..1A10-312766/7-11

品名(Description):BUFFER PLATE BOTTOM_1 & 2
材质(Material):SUS316
尺寸(Size):
原厂型号(OEM PN):TEL#1A10-312766/7-11
产品型号(WST PN):WST.00B11.003/ 004
备注(Note):for G3 Dry-Etching use from AL+anodize to SUS316, extend life-time and reduce re-anodized

14-02.:GEAR RACK-SS1800..1A02-400720-12

品名(Description):GEAR RACK-SS1800
材质(Material):Nylon(MC)、PVDF
尺寸(Size):W15*L38*H17.5mm
原厂型号(OEM PN):TEL#LE1A02-400720-12
产品型号(WST PN):WST.00G03.001
备注(Note):G6

17-03.:LIFT PIN 顶针 for TEL G2.5~G3.5..1A10-333393-11/1A10-327376-12

品名(Description):LIFT PIN 顶针/PIN,LIFTER(C) VP/PIN,LIFTER(E)
材质(Material):DuPont™ Vespel® SP-1、PBI、CEPLA®
尺寸(Size):OD2.5~3.5mm*L150~175mmØ4.45mm*L246mm(PBI) ...etc.
原厂型号(OEM PN):TEL#1A10-333393-11、1A10-327376-12
产品型号(WST PN):WST.00P03.017/ WST.00TP03.026
备注(Note):G2.5~G3.5 for MP1800

17-08.:SECOND/2nd PAD(PIN TWO PAD)..1A10-420910-11

品名(Description):SECOND/2nd PAD(PIN TWO PAD); PAD,CATCH PLATE..SS1800
材质(Material):Vespel®/ PBI®
尺寸(Size):Ver.1=Ø10.82*H9.55mm、Ver.2=外Ø10.82*高H9.55*顶部导角R1.0/ SUS止付螺丝=M3*深L8.5mm
原厂型号(OEM PN):TEL#LE1A10-420910-11
产品型号(WST PN):WST.00P01.028、WST.00P01.013
备注(Note):G6 use in Robot Plate

17-09.:WASHER,Vespel®..

品名(Description):WASHER
材质(Material):DuPont™ Vespel®
尺寸(Size):外Ø12.45*内Ø5.4*厚T3.47mm
原厂型号(OEM PN):TEL#
产品型号(WST PN):
备注(Note):G6 in Vacuum-machine

17-17.:LIFT SUPPORT PIN,DuPont™ Vespel® SP-1..1A10-327278-12

品名(Description):LIFT SUPPORT PIN
材质(Material):DuPont™ Vespel® SP-1
尺寸(Size):OD3.43~3.78mm*L167~176.5mm
原厂型号(OEM PN):TEL#1A10-327278-12
产品型号(WST PN):WST.TBW
备注(Note):G2.5~G3.5

17-20.:Vespel SCREW..


品名(Description):Vespel SCREW
材质(Material):DuPont™ Vespel®
尺寸(Size):Ø13*M5*L29 mm
原厂型号(OEM PN):
产品型号(WST PN):
备注(Note):

17-21.:Vespel PROTECTION CAP with 4 GAS HOLES..


品名(Description):Vespel PROTECTION CAP with 4 GAS HOLES
材质(Material):DuPont™ Vespel®
尺寸(Size):Ø10*Ø6*L9 mm
原厂型号(OEM PN):
产品型号(WST PN):
备注(Note):