Business Items 營業項目

02-07.:SHEET SUPPORT-125/WASHER KAPTON A..1D10-407211-11/1D10-405257-11


品名(Description):SHEET SUPPORT-125(DRM2)、WASHER KAPTONA(DRM2 FOR SCREW UPPER QUARTZ)
材質(Material):KAPTON®(PI)
尺寸(Size):Ø385mm~
原廠型號(OEM PN):TEL-85DRM2#1D10-407211-11、#1D10-405257-11
產品型號(WST PN):WST-RAMEH3532、WST-RAMEH3531
備註(Note):for 8" Dry-Etching used in UNITY88DD.


* WASHER KAPTON A/KAPTON donut: Ex. Ø3mm*Ø6mm*T0.175mm ...etc.

特別說明:本公司所代理銷售之所有KAPTON(PI)商品素材,均屬日本製杜邦DuPont™等級產品,且均已被廣泛使用於高科技產業領域、科學園區客戶並通過其相關驗證行之有年,決非一般市售之大陸素材,特此說明!

03-01.:SUPPORT SHIELD DEPO Q-S5..1D05-200033-11

售價 NT$ 105000


品名(Description):SUPPORT SHIELD DEPO Q-S5(DRM2)
材質(Material):Quartz,GE214LD
尺寸(Size):Ø385*Ø357*T5*H93mm
原廠型號(OEM PN):TEL#1D05-200033-11
產品型號(WSTech. PN):WSTEH35121
備註(Note):for 8" DRAM fab in Dry-Etching of TEL-85SCCM machine system, real use reference in NTC,Taiwan is qualified! Spots 13 EA.


03-02.:COVER BAFFLE Q-L3..1D05-200031-11

售價 NT$ 60000


品名(Description):COVER BAFFLE Q-L3(DRM2)
材質(Material):Quartz,GE214LD
尺寸(Size):Ø296.25*Ø250.3*T4*H115.5mm
原廠型號(OEM PN):TEL#1D05-200031-11
產品型號(WSTech. PN):WSTEH35122
備註(Note):for 8" DRAM fab in Dry-Etching of TEL-85SCCM machine system, real use reference in NTC,Taiwan is qualified! Spots 14 EA.


03-04.:WINDOW DEPO SAF0.5..1D10-406499-11


品名(Description):WINDOW DEPO SAF0.5..8"-Ø200mm/12"-Ø300mm
材質(Material):Sapphire
尺寸(Size):W21.0*L27.5*T0.56~.059mm,Ø65mm/2 *2 sides(for 8"/Ø200mm use)、W24*L27*T0.5±0.05mm(for 12"/Ø300mm use)
原廠型號(OEM PN):TEL-DRM2#1D10-406499-11..for TEL 85DD in SE2000 system use.
產品型號(WST PN):WSTEH12203/M00427
備註(Note):

03-13.:PIN INSULATOR LA6.0(DRM2 QUARTZ)..1D05-300133-11

售價 NT$ 75000


品名(Description):PIN INSULATOR LA6.0(DRM2 QUARTZ)
材質(Material):Quartz,GE214
尺寸(Size):Ø280mm*Ø231.15mm*H18.9mm, Ground-Polish
原廠型號(OEM PN):TEL#1D05-300133-11
產品型號(WST PN):WSTEH3510
備註(Note):for 8" Dry-Etching use, with 1 EA stock!

03-14.:SHIELD DEPO QU-A-3(DRM2 QUARTZ)..1D05-200020-11

售價 NT$ 120000


品名(Description):SHIELD DEPO QU-A-3(DRM2 QUARTZ)
材質(Material):Quartz,GE214
尺寸(Size):Ø384.85mm*Ø328.9mm*H68.6mm, Ground-Polish
原廠型號(OEM PN):TEL#1D05-200020-11
產品型號(WST PN):WSTEH358
備註(Note):for 8" Dry-Etching use, with 1 EA stock!

03-15.:RING INSULATOR B2(DRM2 QUARTZ)..1D05-300053-14

售價 NT$ 65000

品名(Description):RING INSULATOR B2(DRM2 QUARTZ)
材質(Material):Quartz,GE214
尺寸(Size):Ø262.2mm*Ø231mm*H34.3mm, Ground-Polish
原廠型號(OEM PN):TEL-85DRM2#1D05-300053-14
產品型號(WST PN):WSTEH1820
備註(Note):for 8" Dry-Etching use, with 1 EA stock!

03-35.:PLATE UPPER Q FLAT..1D05-300067-13

品名(Description):PLATE..UPPER Q FLAT
材質(Material):Quartz,GE214
尺寸(Size):Ø366mm*T3mm, Ground-Polish
原廠型號(OEM PN):TEL-85DRM2#1D05-300067-13
產品型號(WST PN):WSTEH359
備註(Note):for 8" Dry-Etching use

03-36.:RING F-8SO-Q-260-6H(DRM2 FOCUS RING)..1D05-300162-11

品名(Description):RING F-8SO-Q-260-6H(DRM2 FOCUS RING)
材質(Material):Quartz,GE214
尺寸(Size):Ø260mm*Ø196.36mm*T6.2mm, Ground-Polish
原廠型號(OEM PN):TEL-85DRM2/88DD#1D05-300162-11
產品型號(WST PN):WST-RAMEH3513
備註(Note):for 8" Dry-Etching use in TEL-Unity88DD.

04-03.:SLEEVE B3(DRM2)..1D10-404153-11

品名(Description):SLEEVE B3(DRM2)
材質(Material):Ceramic,Al2O3-AD99.5~7%
尺寸(Size):Ø15.65~Ø12*H6mm
原廠型號(OEM PN):TEL#1D10-404153-11
產品型號(WSTech. PN):WSTEH1862
備註(Note):for 8" DRAM fab. in Etching use

04-20.:CERAMIC TUBE..15-034333-11 REV B4801 US2000

品名(Description):CERAMIC TUBE..15-034333-11 REV B 4801 US 2000
材質(Material):Ceramic, Al2O3(氧化鋁)-AD99.5~7%、Al2O3(氧化鋁)-AD99.9% above、AIN(氮化鋁)-AD98% above、Si3N4(氮化矽)-AD92% above ...etc.
尺寸(Size):Øx~Øx*Lxmm
原廠型號(OEM PN):
產品型號(WST PN):
備註(Note):

04-30.:CERAMIC Robot Pad..

品名(Description):CERAMIC Robot Pad
材質(Material):Ceramic,Al2O3-AD99.5~7%
尺寸(Size):-
原廠型號(OEM PN):TEL#
產品型號(WSTech. PN):WSTEH-
備註(Note):for 6"~12" DRAM fab. in Etching/Diffusion robot use.

05-10.:PLUG THIN..1D10-401106-12

品名(Description):PLUG THIN
材質(Material):PEEK™
尺寸(Size):mm
原廠型號(OEM PN):TEL#1D10-401106-12
產品型號(WST PN):WSTEH1849
備註(Note):with Stocks.

PEEK™是威格斯公司(Victrex®)公司註冊商標。
Victrex® is a registered trademark of Victrex Manufacturing Limited.
PEEK™, APTIV™, PEEK-ESD™, T-Series™, PEEK-HT™, ST™ are trademarks of Victrex plc.
VICOTE® is a registered trademark of Victrex plc.

05-11.:S/D PFA SUPPORTS 6P/SET POLYMAX..PL0005/000M3813-505

品名(Description):S/D PFA SUPPORTS 6P/SET POLYMAX; PLATE,ROTAINER 26 WAFER 200MM
材質(Material):PVDF
尺寸(Size):
原廠型號(OEM PN):SEMITOOL#PL0005; 000M3813-505
產品型號(WST PN):WST-RAMDR11260; WST-RAMSM12104
備註(Note):

05-14.:PFA COVERED SPRING..SP0001

品名(Description):PFA COVERED SPRING
材質(Material):PFA
尺寸(Size):mm
原廠型號(OEM PN):SUGAI#SP0001
產品型號(WST PN):WSTDR11248
備註(Note):with Stocks

05-15.:PIN ADJUST..1D10-404285-11

品名(Description):PIN ADJUST
材質(Material):Peek®
尺寸(Size):mm
原廠型號(OEM PN):TEL#1D10-404285-11
產品型號(WST PN):WSTEH1864
備註(Note):with Stocks

PEEK™是威格斯公司(Victrex®)公司註冊商標。
Victrex® is a registered trademark of Victrex Manufacturing Limited.
PEEK™, APTIV™, PEEK-ESD™, T-Series™, PEEK-HT™, ST™ are trademarks of Victrex plc.
VICOTE® is a registered trademark of Victrex plc.

05-16.:S/D PIN SUPPORT POLYMAX..PL0014

品名(Description):S/D PIN SUPPORT POLYMAX
材質(Material):UPE、MC
尺寸(Size):W26*L36*T5mm
原廠型號(OEM PN):SUGAI#PL0014
產品型號(WST PN):WSTDR11264
備註(Note):with Stocks

05-17.:ECCENTRIC PIN 2.0MM RINGGROVE..2006830-00/01

品名(Description):ECCENTRIC PIN 2.0 MM RINGGROVE/ EXCENTRIC PIN,150 2.0MM SPRAYED RING GROVE
材質(Material):PVDF
尺寸(Size):M9-Ø6*Ø3*H13mm
原廠型號(OEM PN):SEZ#2006830-00/01
產品型號(WSTech. PN):WSTEH3612
備註(Note):Tool=SEZ-RST-203; Stocks=6pcs/ST*(1+11)ST..980330 update; for 8"(Ø200mm) system use

05-18.:PIN SNAP ROTOR..000M4663-01 & 000M4663-03

品名(Description):PIN SNAP ROTOR SHORT/LONG
材質(Material):PCTFE
尺寸(Size):Ø3.98*Ø3.16*L11.86mm
原廠型號(OEM PN):SEMITOOL#000M4663-01 & 000M4663-03
產品型號(WST PN):WST-RAMSM1270 & WST-RAMSM1271
備註(Note):for 8" fabric use.

05-19.:PIN CROSS RETAINER..000M4667-505

品名(Description):PIN CROSS RETAINER
材質(Material):PCTFE
尺寸(Size):mm
原廠型號(OEM PN):SEMITOOL#000M4667-505
產品型號(WST PN):WSTSM11268
備註(Note):with Stocks

05-25.:RETAINER BAR 20MM 52 WAFER..550R0006-503 & 505/550R0006-501

品名(Description):RETAINER BAR 20MM 52 WAFER; COMB 200MM 52 WAFE CARRIERLESS
材質(Material):PCTFE
尺寸(Size):
原廠型號(OEM PN):SEMITOOL#550R0006-503 & 550R0006-505; 550R0006-501
產品型號(WSTech. PN):WST-RAMSM12110~12109; WST-RAMSM1269
備註(Note):for 8"~12" system use; Weight=14.30/15.00±0.5g; Hardness=Shore_D90


* BAR COVER RETAINER#554R0029-01, W9.45*L374mm

05-29.:ECCENTRIC PIN CHUNK300..2008086-xx

品名(Description):ECCENTRIC PIN CHUNK300, Z=28, m=0.5, SHAFT DIAM.=6mm
材質(Material):PVDF
尺寸(Size):M15-Ø6*Ø2*H16.6mm
原廠型號(OEM PN):SEZ#2008086-xx
產品型號(WSTech. PN):
備註(Note):for 12"(Ø300mm) system use

11-06.:UPPER COOLING PLATE..1810-221584-12

品名(Description):UPPER COOLING PLATE
材質(Material):AL6061-T6+Anodize(sulfuric-acid)
規格尺寸(SPEC. Size):Ø280mm* Ø221.1mm*H23mm(Anodized T0.1~0.3mm)
原廠型號(OEM PN):TEL-85DP#1810-221584-12
產品型號(WST PN):WSTEH121
備註(Note):for 8" Dry-Etching use; TEL=sulfuric-acid anodize T0.1~0.3mm(10~30條)/AL淡灰原色, CTC=oxalic-acid anodize T0.1~0.3mm(10~30條)/金黃色

17-04.:Vespel SCREW/PLUG..TEL88DD#1D10-406875-11/1D10-406876-11/1D10-406675-11/1D10-405256-12(22)

品名(Description):SCREW UPPER Q(FLAT)/ PLUG A-1(VE)/ PIN SUPPORT Q-S1/S2
材質(Material):Vespel®
尺寸(Size):mm
原廠型號(OEM PN):TEL-88DD#1D10-406875-11/ 1D10-406876-11/ 1D10-406675-11/ 1D10-405256-12(22)
產品型號(WST PN):WSTEH354~7
備註(Note):

17-05.:PLUG BIAS SILICON CARBIDE ESC..0020-09865

品名(Description):PLUG BIAS SILICON CARBIDE ESC
材質(Material):SiC
尺寸(Size):mm
原廠型號(OEM PN):AMT MXP #0020-09865
產品型號(WST PN):WST-RAMEH3711
備註(Note):

17-06.:SCRAPER DEPO..1D10-407236-11

品名(Description):SCRAPER DEPO
材質(Material):PBI
尺寸(Size):mm
原廠型號(OEM PN):TEL-DRM2#1D10-407236-11
產品型號(WST PN):WSTEH18141
備註(Note):with Stocks

 

17-13.:SILICON UPPER ULECTRODE..1810-22147-24

品名(Description):UPPER ULECTRODE PLATE
材質(Material):100% Silicon
尺寸(Size):
原廠型號(OEM PN):TEL-85DD/DP#1810-22147-24
產品型號(WST PN):WST-S233041
備註(Note):for 8" Dry-Etching use

17-14.:SILICON INSERT RING..0200-100446

品名(Description):SILICON INSERT RING
材質(Material):100% Silicon, 1~10Ω
尺寸(Size):
原廠型號(OEM PN):AMAT#0200-100446
產品型號(WST PN):WSTEH1853/WST-t30056241
備註(Note):for 8" Dry-Etching use

17-15.:SILICON FOCUS RING..1D10-302209-14/1810-225123-11/1810-324902-11/1D05-300296-11...

品名(Description):SILICON FOCUS RING
材質(Material):100% Silicon
尺寸(Size):Ø260mm* Ø196.54mm*T4mm; ...; Ø243mm* Ø196.4mm*T?mm
原廠型號(OEM PN):TEL-85DRM#1D10-302209-14; 1810-225123-11(85 SCCM); 1810-324902-11(8500P); 1D05-300296-11(88DD)
產品型號(WST PN):WSTEH00135; WSTEH4341; WSTWWW
備註(Note):for 8" Dry-Etching use

17-16.:12'' ESC Hot Plate Heater/ULVAC(優貝克) Hot plate, 12''..KTMS-300D-A-1

品名(Description):12'' ESC Hot Plate Heater/ULVAC(優貝克) Hot plate, 12''
材質(Material):PDN+Nitryl coating
尺寸(Size):Ø302.5~Ø209.5mm*T9.5~T20mm
原廠型號(OEM PN):ULVAC#KTMS-300D-A-1
產品型號(WST PN):WST2257623
備註(Note):
1. For Heating & Chuck
2. Using Temp.: 300℃
3. Chuck Voltage: 0.6 V
4. For 12" Multi-Chamber Sputtering System#ENTRON-EX2 W300 (金屬濺鍍設備) use.
5. PSC s/n#044073、059793
   

* Maker: ULVAC CRYOGENICS INCORPORATED(ULVAC CRYOGENICS. INC.)
アルバック・クライオ株式会社

17-22.:CELL BODY ASSY,SCCM-OX(SE)/set..TEL#3D87-003411-14B


品名(Description):CEL BODY ASSY,SCCM-OX(SE)/12" TEL SCCM CELL BODY
材質(Material):-
尺寸(Size):1. OD376mm*T10mm
原廠型號(OEM PN):TEL#3D87-003411-14B=3D10-302020-11+3D10-403381-11+3D10-403380-11+3D10-450070-13
產品型號(WST PN):-
備註(Note):for 12" TEL SCCM use.
1. TEL#3D10-302020-11:GEL,OXT10-75-C912(COC-N)/CEL OX T10-75-C912-CEL BODY ASSY/12" Silicon Cathode(H912) *1pc..本體
2. TEL#3D10-403381-11:BUSH,CEL HOLDER(P)/BUSH UEL HOLDER-P *6pcs..KIT品
3. TEL#3D10-403380-11:SCREW,CEL HOLDER(P)/SCREW UEL HOLDER-P *6pcs..KIT品
4. TEL#3D10-450070-13(#3D10-450071-13):PIN,LOCATE CEL,PC *6pcs..KIT品